Centre for Mesoscience and Nanotechnology

This new multidisciplinary centre is located in the Department of Computer Science, University of Manchester.

Facilities

•     Optical lithography to ~1 µ
•     Optical near-field lithography to ~100 nm
•     Electron beam lithography to ~10 nm
•     Scanning probe lithography to ~1 nm
•     Plasma processing
•     Thin film deposition
•     SEM, AFM, and STM microscopy
•     All above in Class 100 clean room

Further details

Please contact: Dr Ernie Hill or visit http://www.cs.man.ac.uk/nanotechnology/